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The Center for Measurement Standards of the Industrial Technology Research Institute (CMS/ITRI) is pleased to announce that CMS together with four universities will host the 14th International Conference on Metrology and Properties of Engineering Surfaces (Met & Props 2013) in Taipei, Taiwan on June 17-21, 2013. We invite you to join us in Taiwan for this unique opportunity to gain future perspectives on the related surface micro-/nano- metrology. The conference will concentrate on, but is not limited to, the following subjects:

	Surface, Micro and Nano Metrology
	Measurement and Instrumentation
	Metrology for Micro-Systems Technology Devices
	Freeform Surface Measurement and Characterisation
	Uncertainty, Traceability and Calibration
	Atomics Force Microscopy/Scanning Probe Microscopy Metrology
	Tribology and Wear Phenomena
	Functional Applications
	Stylus and Optical Instruments
	Surface Roughness (Line Edge Roughness/Line Width Roughness) in Semiconductor Industry

Conference Organizers:

Industrial Technology Research Institute (Victor Tzeng-Yow Lin, Deputy General Director, Center for Measurement Standards/National Measurement Laboratory)
National Cheng Kung University (Jen-Fin Lin, Professor and ASME fellow, Department of Mechanical Engineering)
National Taiwan University (Kuang-Chao Fan, Professor, Department of Mechanical Engineering)
National Taiwan University of Science and Technology (Chao-Chang Chen, Professor, Department of Mechanical Engineering)
National Tsing Hua University (Shih-Chieh Lin, Professor, Department of Power Mechanical Engineering)

Honorable Sponsors: